DIEL 1000 1 1 0 0 0 "Air"
DIEL 0.5 5 1 0 0 0 "Passive"
DIEL 0.5 4.2 1 0 0 0 "SiO2"
DIEL 3 4.2 1 0 0 0 "SiO2_MT"
DIEL 1 4.1 1 0 0 0 "SiO2"
DIEL 1 4.2 1 0 0 0 "SiO2_M5"
DIEL 0.5 4.1 1 0 0 0 "SiO2"
DIEL 0.5 4.2 1 0 0 0 "SiO2_M4"
DIEL 0.58 4.1 1 0 0 0 "SiO2"
DIEL 0.02 5.5 1 0 0 0 "MIM_DK"
DIEL 0.5 4.2 1 0 0 0 "SiO2_M3"
DIEL 0.38 4.2 1 0 0 0 "SiO2"
DIEL 0.02 5.5 1 0 0 0 "MIM_DK"
DIEL 0.5 4.2 1 0 0 0 "SiO2_M2"
DIEL 0.3 4.1 1 0 0 0 "SiO2"
DIEL 0.4 4.2 1 0 0 0 "SiO2_M1"
DIEL 0.5 4.1 1 0 0 0 "SiO2"
DIEL 0.2 3.5 1 0 0 0 "XYZ"
DIEL 0.1 4 1 0 0 0 "SiO2_below"
DIEL 300 11.9 1 0 0 5 "Substrate"
METAL METAL_TOP 0 0 0 0 0 1 "METAL_TOP" 3 "ThickMetalModel" 33333000 3 0 2 "Default"
METAL METAL5 0 0 0 0 0 2 "METAL5" 5 "ThickMetalModel" 33333000 1 0 2 "Default"
METAL METAL4 0 0 0 0 0 3 "METAL4" 7 "ThickMetalModel" 33333000 0.5 0 2 "Default"
METAL METAL3 0 0 0 0 0 4 "METAL3" 10 "ThickMetalModel" 33333000 0.5 0 2 "Default"
METAL METAL2 0 0 0 0 0 5 "METAL2" 13 "ThickMetalModel" 31250000 0.5 0 2 "Default"
METAL METAL1 0 0 0 0 0 6 "METAL1" 15 "ThickMetalModel" 31250000 0.4 0 2 "Default"
METAL ACTIV 0 0 0 0 0 7 "ACTIV" 18 "ThickMetalModel" 20000000 0.1 0 2 "Default"
METAL MIM 0 0 0 0 0 8 "MIM" 8 "Normal" 25000000 0.02 0 2 "Default"
METAL MIM2 0 0 0 0 0 8 "MIM2" 11 "Normal" 25000000 0.02 0 2 "Default"
VIA VIA_T 0 0 0 0 0 11 "VIA_T" 3 5 "Normal" 10000000 1 0 2 "Default"
VIA VIA4 0 0 0 0 0 11 "VIA4" 5 7 "Normal" 10000000 1 0 2 "Default"
VIA VIA3 0 0 0 0 0 11 "VIA3" 7 10 "Normal" 10000000 1 0 2 "Default"
VIA VIA2 0 0 0 0 0 11 "VIA2" 10 13 "Normal" 10000000 1 0 2 "Default"
VIA VIA1 0 0 0 0 0 11 "VIA1" 13 15 "Normal" 10000000 1 0 2 "Default"
VIA CONT 0 0 0 0 0 11 "CONT" 18 15 "Normal" 10000000 1 0 2 "Default"
VIA VMIM 0 0 0 0 0 11 "VMIM" 7 8 "Normal" 10000000 1 0 2 "Default"
VIA VMIM2 0 0 0 0 0 11 "VMIM2" 10 11 "Normal" 10000000 1 0 2 "Default"
GDSLAYER METAL_TOP 20
GDSLAYER METAL5 21
GDSLAYER METAL4 22
GDSLAYER METAL3 23
GDSLAYER METAL2 24
GDSLAYER METAL1 25
GDSLAYER ACTIV 30
GDSLAYER MIM 40
GDSLAYER MIM2 41
GDSLAYER VIA_T 60
GDSLAYER VIA4 61
GDSLAYER VIA3 62
GDSLAYER VIA2 63
GDSLAYER VIA1 64
GDSLAYER CONT 65
GDSLAYER VMIM 70
GDSLAYER VMIM2 71
